From June 4 to 6, GMY will participate in theChina(Shenzhen)International Semiconductor Exhibition 2025, and cordially invites industry partners to visit Hall 14, Booth 14G22 for in-person discussions on the innovative applications of 172nm excimer lighting technology in semiconductor manufacturing and to jointly explore new approaches to process optimization.

Debut Launch of the 172nm MINI Experimental Module

At this exhibition, GMY will officially launch its independently developed 172nm MINI Experimental Module. Designed specifically for semiconductor process research and development, process validation, and small-batch pilot production, this product features a compact structure, controlled cost, plug-and-play desktop configuration, and flexible portability. It is adaptable to a variety of experimental environments and process requirements.

172nm Deep Ultraviolet Technology

This deep ultraviolet technology efficiently decomposes organic residues on wafer surfaces, improving cleanliness and adhesion performance, and providing a stable pre-treatment solution for processes such as packaging and cleaning.

Simplified Structure, New Desktop Excimer Experiment Experience

Traditional excimer irradiation systems, with their complex high-purity N₂-filled structures, are typically difficult to apply in flexible, desktop-level experiments. GMY has introduced an innovative, compact tabletop excimer light source—the 172nm MINI Experimental Module. Roughly the size of a book, it features a highly integrated, lightweight design, breaking through space and cost constraints. This solution enables universities, enterprises, and research institutes to easily build excimer light experimental environments, meeting R&D needs in areas such as flat panel display photocleaning and plastic surface modification.

Application Fields:

Removal of organic surface contaminants

Surface activation and modification

Surface cleaning treatment for packaging processes

Validation of ultra-clean and ultra-fine cleaning processes

Complete 172nm Product Series to Be Showcased

In addition to the new product launch, GMY will exhibit a wide range of 172nm excimer series light sources and modules, covering key process stages such as wafer cleaning, semiconductor substrate surface activation, and TOC degradation in ultrapure water systems. These offerings provide more options for process optimization and equipment upgrades.

Flat light sources

Gold wire electrode tubular light sources

Mesh electrode tubular light sources

172nm Excimer Series Light Sources

172nm Excimer Series Modules and Equipment

International Semiconductor Exhibition 2025 | Invitation to Visit

GMY welcomes semiconductor manufacturing enterprises, equipment manufacturers, process development engineers, and industry partners to visit the booth, explore the diverse applications of 172nm excimer lighting technology in semiconductor manufacturing, and discuss cooperation opportunities.

Exhibition Information

China(Shenzhen)International Semiconductor Exhibition 2025

Date: June 4–6, 2025

Venue: Shenzhen World Exhibition & Convention Center, Hall 14

Booth No.: 14G22