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172nm High-Energy Photo-Cleaning Machine

The 172nm High-Energy Photo-Cleaning Machine is utilized for the high-energy decomposition and cleaning of organic particles on the surface of metal materials or silicon-based materials to enhance the performance of semiconductors or batteries. This machine uses high-energy 172nm UV photons to break the chemical bonds of organic molecules, decomposing them into smaller molecules or atoms. Concurrently, 172nm UV photons react with oxygen in the air to form reactive oxygen and ozone, which further decompose to produce more reactive oxygen. These reactive oxygen molecules react with the decomposed organic molecules through oxidation, creating oxides that volatilize, thus completing the surface cleaning. The 172nm high-energy photo-cleaning machine can efficiently remove surface organic contaminants without causing damage to the substrate surface, achieving non-destructive cleaning.
In addition, by precisely controlling the intensity, 172nm excimer light can also complete nano-level modification of the substrate surface.
Availability:

172nm High-Energy Photo-Cleaning Machine

Enhancing the Performance of Semiconductors or Batteries



Features:

  • High-Speed Cleaning: 10 times the cleaning speed of low-pressure lamps;

  • Individual Switching: Allows individual switching of each lamp to ensure lamp life;

  • Low-Temperature Operation: Prevents thermal damage, with surface temperature not exceeding 40℃;

  • Low Energy Consumption: 65% less energy than mercury lamps;

  • Space-Saving: Supports the entire system with a compact power supply;

  • Easy Maintenance: Easy to clean and maintain, with quick lamp exchange;

  • High Uniformity: Uniformity of ±15% in the irradiation area increases stability.


Specifications:

  • Product Model: EX-C300

  • Total Power: <400W

  • Input Voltage: AC220V

  • Nitrogen Input: 30Lpm

  • Intensity (Distance from the irradiation surface 8mm): >45 mW/cm2

  • Operating Temperature: -5℃~50℃

  • Operating Humidity: 20%~80%

  • Cooling Method: Recirculating water cooling (25℃)

  • Service Life: 1000hrs


Creating Better Life with Light

APPLICATION

CONTACT US

  No.328 Xinxing Road,  Gonghe  Town,  Heshan City, Guangdong, China
  +86-138-2232-1273
  +86-750-830-9207
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