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172nm MINI-Excimer Experimental Module

GMY is a professional 172nm excimer light application solution provider, offering fully customized application solutions and contract experimental services for various applications, including photocleaning, surface modification, and UV curing. We support customers in efficiently advancing their process R&D and validation projects.
 
The 172nm MINI Excimer Experimental Module is specifically designed for semiconductor process R&D, process validation, and small-batch pilot production. Featuring a highly integrated and lightweight design, the module is about the size of a book, with a compact structure and excellent cost-performance ratio. It is plug-and-play, easy to carry, and effortlessly adapts to various experimental environments. Ideal for universities, enterprises, and research institutes, it enables efficient setup of excimer light experimental platforms and is widely applied in multiple fields, including flat panel display photocleaning and plastic surface modification.
 
Availability:


172nm MINI-Excimer Experimental Module

This module efficiently decomposes organic residues on wafer, glass, and plastic surfaces, enhancing surface cleanliness and adhesion to provide a stable and reliable pre-treatment solution for packaging, cleaning, and other process applications. Air-cooled and capable of reaching 90% light output within 5 seconds, it ensures high irradiance uniformity and consistent experimental performance.


Application Fields

  • Removal of organic contaminants from surfaces

  • Surface activation and modification

  • Surface cleaning for packaging process applications

  • Validation of ultra-clean and ultra-fine cleaning processes



Key Features

  • Compact and lightweight, desktop-ready plug-and-play design

  • High-intensity 172nm UV output, rapid 5-second stable ignition

  • Uniform irradiance for consistent and reliable processing results

  • Air-cooled, no external cooling system required

  • Customizable application solutions and contract experimental services available



Specifications


Parameter

Value

Model

EX-D75-1
Central Irradiance (@1mm)

>10mW/cm²

Irradiance Uniformity±10%
Time to Reach 90% Output≤5 seconds
Average Lamp Lifetime>1000 hours
Cooling Method

Air cooling

Module Dimensions (L×W×H)

209×142×69 m

Window Opening Size (L×W)

75×50 mm





Creating Better Life with Light

APPLICATION

CONTACT US

  No.328 Xinxing Road,  Gonghe  Town,  Heshan City, Guangdong, China
  +86-138-2232-1273(WhatsApp)
  +86-750-830-9207
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