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This module efficiently decomposes organic residues on wafer, glass, and plastic surfaces, enhancing surface cleanliness and adhesion to provide a stable and reliable pre-treatment solution for packaging, cleaning, and other process applications. Air-cooled and capable of reaching 90% light output within 5 seconds, it ensures high irradiance uniformity and consistent experimental performance.
Removal of organic contaminants from surfaces
Surface activation and modification
Surface cleaning for packaging process applications
Validation of ultra-clean and ultra-fine cleaning processes
Compact and lightweight, desktop-ready plug-and-play design
High-intensity 172nm UV output, rapid 5-second stable ignition
Uniform irradiance for consistent and reliable processing results
Air-cooled, no external cooling system required
Customizable application solutions and contract experimental services available
| Parameter | Value |
Model | EX-D75-1 |
| Central Irradiance (@1mm) | >10mW/cm² |
| Irradiance Uniformity | ±10% |
| Time to Reach 90% Output | ≤5 seconds |
| Average Lamp Lifetime | >1000 hours |
| Cooling Method | Air cooling |
| Module Dimensions (L×W×H) | 209×142×69 m |
Window Opening Size (L×W) | 75×50 mm |
This module efficiently decomposes organic residues on wafer, glass, and plastic surfaces, enhancing surface cleanliness and adhesion to provide a stable and reliable pre-treatment solution for packaging, cleaning, and other process applications. Air-cooled and capable of reaching 90% light output within 5 seconds, it ensures high irradiance uniformity and consistent experimental performance.
Removal of organic contaminants from surfaces
Surface activation and modification
Surface cleaning for packaging process applications
Validation of ultra-clean and ultra-fine cleaning processes
Compact and lightweight, desktop-ready plug-and-play design
High-intensity 172nm UV output, rapid 5-second stable ignition
Uniform irradiance for consistent and reliable processing results
Air-cooled, no external cooling system required
Customizable application solutions and contract experimental services available
| Parameter | Value |
Model | EX-D75-1 |
| Central Irradiance (@1mm) | >10mW/cm² |
| Irradiance Uniformity | ±10% |
| Time to Reach 90% Output | ≤5 seconds |
| Average Lamp Lifetime | >1000 hours |
| Cooling Method | Air cooling |
| Module Dimensions (L×W×H) | 209×142×69 m |
Window Opening Size (L×W) | 75×50 mm |
